Compressible Gas Flow Inside a Two-Dimensional Uniform Microchannel

This paper analyzes a compressible gas flow through a microchannel, and reports a complete set of first-order analytical solutions. Thiswork represents an extension of the previouswork ofArkilic on compressibleflows through amicrochannel. First, by comparing themagnitudes of different forces in the compressible gasflow,weobtain proper estimations for the Reynolds and Mach numbers at the channel exit. Second, based on these estimations, we obtain asymptotic analytical solutions of velocities, pressure, and temperature distributions of compressible gas flow inside the microchannel with a relaxation of the isothermal assumption, which was previously used by many researchers. Numerical simulations of compressible flows through microchannels with a compressible Navier–Stokes equation solver are performed and combined with velocity slip and temperature jump wall boundary conditions. The numerical simulation results validate the analytical results from this study.